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Products and Technology - VPX Cluster Platform |
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VPX with Single Input/Output Cassette Module The VPX configuration is based on a Brooks Marathon Express MX-400 with single VCE 6 load lock and manual door; an optional wafer aligner is also available. The VPX has 3 process module facets, and is compatible with both the Monarch 3 and CET 25 Process Modules. VPX with Monarch 3 Process Modules
VPX with CET25 Process Modules
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