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Products and Technology - CPX Cluster Platform |
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CPX with Dual Input/Output Cassette Modules The CPX configuration is based on a Brooks Marathon Express MX-600 with dual VCE 6 load locks and automatic doors; a wafer aligner is also included. The CPX has 4 process module facets, and is compatible with both the Monarch 3 and CET 25 Process Modules. CPX with CET25 Process Modules
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