Products and Technology - MEMS-CET Configurations and Specifications


Production Cluster Tool System

This flexible configuration comprises up to five MEMS-CET Modules mounted on a Vacuum Wafer Transport System with separate Input and Output Vacuum Cassette Elevators (which accept standard SEMI 25-wafer cassettes), two Electrical Control Cabinets and a Primaxx Control Tower.

In addition, an anhydrous HF Gas Supply Cabinet and at least two dry mechanical vacuum pumps are required for system operation (one two-stage dry mechanical pump needed for each MEMS-CET Module and one single stage dry mechanical pump for the Vacuum Handler). The system is capable of running up to 200 mm (8") substrates.




Primaxx MEMS-CET 5-Chamber Cluster Tool (with single 25-wafer chamber installed)