Products and Technology - MEMS-CET Configurations and Specifications


Semi-Automated Cluster System with Single Input/Output Cassette Module

This system comprises a MEMS-CET Processing Module coupled to a four-sided Vacuum Wafer Handler, a single Input/ Output Vacuum Cassette Elevator (accepts a standard SEMI wafer cassette), two Electrical Control Cabinets and a Primaxx Control Tower. Up to two additional MEMS-CET Modules can be added to the tool as options.

In addition, an anhydrous HF Gas Supply Cabinet and at least two dry mechanical vacuum pumps are required for system operation (one two-stage dry mechanical pump for each MEMS-CET Module, one single stage dry mechanical pump for the Vacuum Handler). The system is capable of running up to 200 mm (8") substrates.




Primaxx MEMS-CET 3-Chamber Cluster Tool (with single 3-wafer chamber installed)