Products and Technology - MEMS-CET Configurations and Specifications


Stand-Alone Manual Loading System

The MEMS-CET Manual Loading System consists of a Primaxx MEMS-CET Processing Module, a three position Manual Substrate Loading Slide, and a Control Cabinet. This manual system can process one to three substrates of up to 200 mm in diameter.

The Manual Substrate Loading Slide is equipped with a stepper motor operated loading arm end effector capable of loading one to three substrates of up to 200 mm size into the process chamber. The loading arm's end effector is electronically positioned for loading and is mounted on precision linear slides for manual wafer insertion into the process chamber.

In addition, an anhydrous HF Gas Supply Cabinet and one dry mechanical vacuum pump for the MEMS-CET Module are required for system operation.