Series of wet-etched cantilever structures illustrating the problem of "stiction"

Cantilevers that have been fully released in the Primaxx MEMS-CET system

Series of 8 micron cantilevers before
etch-release

8 micron cantilevers after etch-release using
the Primaxx MEMS-CET system (blurring
indicates release and upward flexing)

Gyroscope structure releases in the Primaxx MEMS-CET system

Silicon nanowire released in the Primaxx MEMS-CET system (courtesy Kagawa University)

Isotropic etch undercut of silicon features (courtesy Matsushita Electric Works)