Products and Technology - LSMCD Configurations and Specifications

Automated Cluster Tool System

The Primaxx LSMCD Cluster System is a fully integrated, automated cluster tool designed to deposit high performance complex metal oxide and other films on substrates up to 200 mm diameter with controlled thickness, high conformality, and good electrical properties.

Included with the system are integrated Input and Output modules coupled to an atmospheric pressure Cluster Tool Platform, LSMCD Process Module, two RTA Modules, Electrical Cabinets, Gas Cabinet and Control Tower. Support electronics and gas control elements are conveniently housed in key-locked cabinets for safe, limited access control of all cluster tool facilities. In addition, a dry mechanical vacuum pump is required for cluster tool operation (one vacuum pump needed for each LSMCD module installed).


Automated Solvent Dispense System (Chem Cabinet - Optional)

The Primaxx Solvent Dispense System safely handles the solvent supply and dispense operations required by the LSMCD Auto Clean and Edge Removal functions. This system is designed to accommodate either manual or automatic bulk fill operation with automated pressurized dispense. Chemical control monitoring includes solvent leak detection and site-specific vapor detection with audio-visual alarms. A five gallon supply canister and a three gallon dispense canister are housed in a double-walled, stainless steel, ventilated enclosure. Dispense operations and alarm status are indicated on a touch screen display and monitored by the cluster tool software for integrated control.