Products and Technology - LSMCD Configurations and Specifications


Stand-Alone Lab/Research System with Manual Wafer Loading

The Primaxx LSMCD Lab/Research Deposition System is a self contained, manually loaded research tool . The process operates at essentially atmospheric pressure without the need for a substrate handing system: users simply connect basic facilities, manually load product, and begin processing. The Lab Deposition System consists of an LSMCD Process Module, a Control Tower and a Manual Substrate Loading Platform.

The Manual Substrate Loading Slide is equipped with a stepper motor operated loading arm end effector capable of loading one to three substrates of up to 200 mm size into the process chamber. The loading arm's end effector is electronically positioned for loading and is mounted on precision linear slides for manual wafer insertion into the process chamber.

In addition, one dry mechanical vacuum pump for the is required for system operation.