Strategic Partners

Primaxx was acquired by Sumitomo Precision Products Co. Ltd. (SPP) headquartered in Amagasaki, Japan, in June 2007. Prior to the acquisition, Primaxx had entered into a sales/distribution, service and manufacturing agreement with SPP. Under the terms of this agreement, Sumitomo Precision Products are acting as Primaxx's exclusive sales and service representative in Japan for all MEMS-CET etching products.

SPP is a leading Japanese manufacturer and distributor of cleaning and etching equipment for semiconductor and MEMS manufacturers in Japan. Their product portfolio includes wet cleaning systems, wet process TFT (Thin Film Transistor) LCD etching systems, wet process substrate carrier cleaning systems and spin driers. In the field of dry processing, as the majority shareholder in Surface Technology Systems PLC, SPP manufactures the ASE range of ICP etching systems under license, and sells the STS product line in Japan. Primaxx CET products complement this dry processing equipment. In addition, in order to ensure the best customer support possible, SPP maintains a clean room based demonstration facility in the Osaka area, ensuring a fast turnaround of demonstration samples.


Primaxx has Sales and Service Representation Agreements with Surface Technology Systems PLC and ST Systems USA, Inc. (STS). Under the terms of this agreement, STS are acting as Primaxx's exclusive sales, marketing and service representative in Europe, Asia and North America for all MEMS-CET etching products.

STS designs and manufactures a range of highly specialized machines incorporating innovative technology used in the production of semiconductors and semiconductor related devices. Semiconductors, which are miniature electronic circuits, are usually associated with memory chips in computers. However, STS serves a range of applications outside this mainstream memory chip market in several emerging sectors within the telecommunications, information technology and new micro electromechanical systems industries.

STS is a market leader in silicon etching within the growing MEMS market with patent protected technology. In addition, STS has strong presence in each of its other served markets and distributes its machines world-wide through an experienced sales and service operation consisting of direct sales, distributors and agents. The Group currently markets in over 30 countries and has an installed base of approximately 650 machines with customers.


Penn State University - Primaxx maintains a Cooperative Research Agreement with PSU. Research and customer demonstrations are performed on Primaxx equipment located at the University. Primaxx etch equipment is used to demonstrate stiction free MEMS etch release capability; this technology has also been used as a pre-clean for Atomic Layer Deposition.

The development program is run under the leadership of Dr. Jerzy Ruzyllo. Dr. Ruzyllo is a Fellow of the Electrochemical Society and a Fellow of IEEE.