Primaxx appoints Surface Technology Systems as exclusive Sales and Service representative for Europe
(30 November, 2003 – Allentown, PA) Primaxx, Inc. announced today that it has appointed Surface Technology Systems PLC as exclusive European sales and service representative for its MEMS etching and thin film deposition products.
Surface Technology Systems PLC is located in Newport, Wales in the United Kingdom and have a network of subsidiaries and sales/service representatives throughout Europe. The STS Group is a leading provider of specialist plasma etch and deposition systems to customers in the MEMS, Optoelectronic, Compound Semiconductor and Thin Film Head industries. STS is the market-leading supplier of deep silicon etch technology for MEMS micromachining with its award winning Advanced Silicon Etch (ASEâ) process.
Primaxx, Inc., headquartered in Allentown, PA, designs, manufactures, and markets advanced thin film deposition and dry etch systems for the semiconductor industry. Primaxx patented technologies include Liquid Source Misted Chemical Deposition (LSMCD), Vortex-Chemical Vapor Deposition (V-CVD) and Clean Dry Etch (CET) systems and processes. Primaxx’s MEMS-CET system utilizes a reduced pressure, gas phase, controlled anhydrous HF/Methanol etch process to provide selective, residue free MEMS “etch release” capability for silicon and thermal oxides which mitigates “runaway” conditions. Etch rates of up to 10 microns/minute can be achieved, depending on the type of oxide used. This gas phase process provides maximum feature penetration and eliminates contamination and “stiction” increasing device yields especially with three-dimensional structures; it also eliminates the problems associated with wet-etch and supercritical drying technologies and is much less susceptible to etch defects. The MEMS-CET system can be supplied in stand-alone or cluster tool (multiple module) configurations. The company is the leader in delivering superior manufacturing technology for the development and volume production of advanced devices used in a wide range of products including next generation smart cards, flat panel displays, hard drives, mobile phones, digital cameras, projection systems, PDA’s, and GPS devices.
For more information, contact Paul Hammond of Primaxx, Inc. at:
Tel: +1 (610) 336-0314
Fax: +1 (610) 336-0455
Internet: http://www.primaxxinc.com
email: phammond@primaxxinc.com
or contact Ian Wright of Surface Technology Systems, PLC. at:
Tel +44 (01633) 652400
Fax +44 (01633) 652405
Internet: http://www.stsystems.com
email: ian.wright@stsystems.co.uk