Primaxx appoints ST Systems USA as exclusive Sales and Service representative for its HF Vapor MEMS Etching Products
(14 July, 2003 - San Francisco, CA) Primaxx, Inc. announced today that it has appointed ST Systems USA, Inc. as exclusive North American sales and service representative for its MEMS etching products. Paul Hammond, VP of Sales at Primaxx commented " We have found an exceptional partner in STS. As well as introductions to numerous potential customers, STS will provide a wealth of MEMS industry experience, a knowledgeable sales force and a well-trained service staff. This mutually beneficial relationship provides STS with a complementary product offering and gives us the opportunity to gain maximum exposure for our MEMS products and technology in the US. "
Andy McQuarrie, GM of ST Systems USA, Inc. added " We have been impressed with Primaxx's commitment to the development of leading edge technologies and these clearly compliment STS' activities. We look forward to this relationship. "
Primaxx's MEMS-CET system utilizes a reduced pressure, gas phase, controlled anhydrous HF/Methanol etch process to provide selective, residue free MEMS "etch release" capability for silicon and thermal oxides which mitigates "runaway" conditions. Etch rates of up to 10 microns/minute can be achieved, depending on the type of oxide used. This gas phase process provides maximum feature penetration and eliminates contamination and "stiction" increasing device yields especially with three-dimensional structures; it also eliminates the problems associated with wet-etch and supercritical drying technologies and is much less susceptible to etch defects. The MEMS-CET system can be supplied in stand-alone or cluster tool (multiple module) configurations.
ST Systems (USA) Inc., with a main office in Redwood City, CA, is a wholly owned subsidiary of Surface Technology Systems plc. The STS Group is a leading provider of specialist plasma etch and deposition systems to customers in the MEMS, Optoelectronic, Compound Semiconductor and Thin Film Head industries. STS is the market-leading supplier of deep silicon etch technology for MEMS micromachining with its award winning Advanced Silicon Etch process.
Primaxx, Inc., headquartered in Allentown, PA, designs, manufactures, and markets advanced thin film deposition and dry etch systems for the semiconductor industry. Primaxx patented technologies include Liquid Source Misted Chemical Deposition (LSMCD), Vortex-Chemical Vapor Deposition (V-CVD) and Clean Dry Etch (CET) systems and processes. The company is the leader in delivering superior manufacturing technology for the development and volume production of advanced devices used in a wide range of products including next generation smart cards, flat panel displays, hard drives, mobile phones, digital cameras, projection systems, PDAs, and GPS devices.
For more information, contact Paul Hammond of Primaxx, Inc. at:
Tel: +1 (610) 336-0314
Fax: +1 (610) 336-0455
Internet: http://www.primaxxinc.com
email: phammond@primaxxinc.com
or contact Andrew McQuarrie of ST Systems USA, Inc. at:
Tel +1 (650) 569-3655 x 12
Fax +1 (650) 569-3663
Internet: http://www.stsystems.com
email: AMcQuarrie@compuserve.com