News Releases

February 2011

 Primaxx acquired by SPP Process Technology Systems (SPTS)

June 2007

 Primaxx acquired by Sumitomo Precision Products of Japan
September 2005

Primaxx Inc. receives HF Vapor MEMS Etcher order from Fraunhofer-ISIT
August 2005

Primaxx receives order from Siimpel Corporation for a multi-wafer MEMS Etch Release Cluster Tool
February 2005

DALSA selects Primaxx as its Strategic Supplier for MEMS Etch Release Production Equipment
October 2003

Primaxx signs European Sales and Service agreement with Surface Technology Systems, PLC
July 2003

Primaxx appoints ST Systems USA as exclusive Sales and Service representative for its HF Vapor MEMS Etching Products

March 2003

New Gas Phase Etching System releases delicate MEMS structures without stiction

 

2010 Calendar of Events

Mar 16 - 18

Semicon China, New International Expo Center, Shanghai, China (on LASERWORT booth)

Jun 6 - 10

Solid State Sensor, Actuator and Microsystems Workshop, Crowne Plaza, Hilton Head, SC, USA

Jul 13 - 15

Semicon West, Moscone Center, San Fransisco, CA, USA

Jul 28 - 30

Micromachine/MEMS 2010, Tokyo Big Sight, Tokyo, Japan (Sumitomo Precision Products booth)